VOSC

Product Overview

Purpose: Installed upstream of the vacuum pump to isolate the main equipment and fore-line from the vacuum pump.

·  Maintains equipment or fore-line cleanliness and vacuum integrity. Prevents contamination caused by pump malfunctions or operations, isolating when necessary.

·  During non-standard process operations or fore-line work, isolates from the upper condition to the pump, preventing pump overload or contamination. Prevents failure caused by pump restart after shutdown during equipment or fore-line operations.

· Rapid shutdown during pump trips prevents or minimizes back pressure & backflow of contaminants, → protecting chambers and wafers from particle contamination.

Product Performance

· Mechanism optimized for extended lifespan and vibration resistance;

· High conductivity due to absence of internal cross-sectional restrictions;

· Easy maintenance and replacement.