VOSC

Product summary

Usage: it is installed at the front end of Vacuum Pump to isolate the main equipment, Fore-line and Vacuum Pump.

· In order to keep the equipment or Fore-line clean and vacuum, and avoid pollution caused by the abnormal state and operation of Pump, it is necessary to isolate it.

· During normal operation of equipment other than Process or Fore-line, isolation shall be carried out from the upper Condition to the Pump to prevent the Pump from being overloaded or polluted. It can prevent the failure phenomenon caused by stopping and restarting the Pump when the equipment or Fore-line is working.

· Pump trip can be quickly closed, so as to prevent or minimize the phenomenon of back pressure-pollution source countercurrent, and→ protect Chamber and Wafer from Particle pollution.

Product performance

· Soft pumping function;

· Quick Closing (0.3~0.4s)；

· Auto Close and Monitoring； can be realized through Pump/ device communication;

· Vibration & Particle free -In-Line Gate Valve；

· Cost-effective;