VOSC

Product Overview

Purpose: Installed upstream of the vacuum pump to isolate the main equipment and fore-line from the vacuum pump.

·  To maintain equipment or fore-line cleanliness and vacuum integrity. Isolation is performed when necessary to prevent contamination caused by pump malfunctions or operational issues.

·  During non-standard process operations or fore-line work, isolates the pump from the upstream conditions to prevent overload or contamination. Prevents failure caused by pump restart after shutdown during equipment or fore-line operations.

·  Rapid closure upon pump trip prevents or minimizes back pressure & contamination backflow → Protects the chamber and wafer from particle contamination.

Product Features

·  Soft Pumping function;

·  Quick Closing (0.4~0.6s);

·  Auto Close and Monitoring via Pump/Equipment-side communication;

·  Powder & Particle Protection function;

·  Suitable for powder-intensive processes;